Measurement Capabilities:
10 fem-to-amp and 0.2 microvolt measurement resolution
QSCV, Stress Mode, Knob-sweep, and Stand-by functions
+/- 200 Volts and +/- 1 Amp High-Power SMU, Pulse Generator capabilities available by optional 41501B
SMU Measurement Resolution:
Voltage: 2 µV
Current: 1 fA
SMU Measurement Accuracy:
Voltage: 200 µV
Current: 20 fA
SMU pulse width: 500 µs/100 ms
VMU:
Resolution: 2 µV
Accuracy: 200 µV
VMU (differential)
Resolution: 0.2 µV
Accuracy: 10 µV
Dual High Voltage Plus Generator
Voltage range: +/- 40V
Output current: +/- 200 mA
Minimum pulse width: 1 µs
Minimum pulse period: 2 µs